The KXCNL-1010 is a tri-axis accelerometer with selectable full-scale ranges of ±2g, ±4g, ±6g, or ±8g, incorporating an integrated programmable state machine. The sensing element is fabricated using Kionix's proprietary plasma micromachining process technology. Acceleration sensing is based on the differential capacitance principle, where motion of the sensing element is induced by acceleration; common-mode rejection is also employed to reduce errors caused by process variations, temperature, and environmental stress. The sensing element is hermetically sealed at the wafer level by bonding a second silicon cap wafer to the device using glass frit. A discrete ASIC co-packaged with the sensing element provides signal conditioning and an intelligent user-programmable state machine. The accelerometer is housed in a 3×3×0.9mm LGA plastic package and powered by a 1.8–3.6V DC supply. Communication with the device is conducted via the I²C interface for loading state programs, configuring settings, and reading acceleration data updates.
ROHM KXCNL-1010-FR